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NEW BAYARD ALPERT HOT ION GAUGE - STANDARD

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NEW BAYARD ALPERT HOT ION GAUGE - STANDARD

  • 详细内容
  • 规格
  • 零件号
  • 耗材

NEW BAYARD ALPERT HOT ION GAUGE - STANDARD

For applications that require a stand alone hot ion gauge, INFICON offers the single Technology Bayard Alpert Hot Ion Gauge with its NEW highly economical standard double filament solution.

产品

  • BAG302 Medium to Ultra High Vacuum Gauge


益处

  • Wide measurement range from 1.3 × 10-9 to 6.7×10-2 mbar(1 × 10-9 to 5 × 10-2 Torr)

  • Two standard long-life yttrium oxide coated iridium filaments

  • All-in-One active gauge with built-in display, set-point, analog output and standard integrated RS485 digital interface

  • Bright digital OLED display with keypad for simple setup, operation and programming

  • User programmable set point relay

  • User programmable display units in mbar, Torr or Pa

  • User selectable Auto-ranging of emission current

  • Mechanical strength and ruggedness

  • Choice of various flange options

  • Easy to exchange sensing element

  • Compliance & standards: CE, RoHS

  • Direct drop in replaces Granville-Phillips® 354 Micro-Ion® Module – identical control functions including softwarecommands (RS485)

    (Granville-Phillips® and Micro-Ion® are registered trademarks of MKS Instruments, Andover, MA)


典型应用

  • Pressure measurement in semiconductor process and transfer chambers

  • Industrial coating

  • General vacuum measurement and control in the low to ultra high vacuum range

新闻

We are accepting orders from now on!


规格

类型

BAG302



Messurement range

1.3 x 10-9 ... 6.7 x 10-2

Accuracy (N2)


1.3×10-8 … 6.7 ×10-2mbar

% of reading

±15

1×10-8 … 5×10-2 Torr

% of reading

±15

Repeatability

% of reading

±5

Degas


p < 6.7 x 10-5

mbar

electron bombardment, 2 min (default)

p < 5.00 x 10-5

Torr

(programmable between 2 。。。 10 min)

Temperature


Operation (ambient)

°C

0 。。。 +40

Storage

°C

-40 ... +70

Bakeout at flange (sensor only, electrics removed)

°C

200

Supply voltage

V (dc)

+20 ... +28

Output signal analog

V

0 ... +9 (log-linear)

Voltage vs. pressure

volts per decade

1

Setpoint relay


1 (single-pole double-throw relay (SPDT))
1 A at 30 V (dc) resistive, or V (ac) non-inductive

Electrical connection


D-Sub, 9-pin, male for analog, D-Sub, 9-pin, female for RS485

Interface (digital)


RS485

Emission control


manual

Filament


two Yt2O2 coated Ir

Filament status


display / digital output

Digital functions


degas, filament on/off and emission control

Materials exposed to vacuum


Yt2O3, Ir, W, Ta, stainless steel, glass, Ni

Mounting orientation


any

Internal volume

cm³ (in.³)

16.4 (1.0)

Weight KF / CF

270


零号件

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